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Thinfilm Metrology > Optical Profilometer

 

 

The Holographic MEMS Analyzer measures 3D vibrations over the full field of view without XYZ scanning. Millions of data points are acquired simultaneously for measurement of 3D vibrations with similar resolution as a laser vibrometer.

 

Key Features

Live Dynamical 3D Topography

  • Frequency range from Static to 25MHz
  • Measure vertical velocities up to 10 m/s

3D Vibration Analysis

  • Full field of view measurement without XYZ scanning
  • in-plane vibrations resolution :  1 nm
  • out-of-plane vibrations resolution : 5 pm

Flexible Instrument

  • Turret with up to 6 objectives
  • Measurement in environmental chamber

 

MEMS Analysis Tool Software

It is a post processing software that provides a solution for performing detailed and precise analysis of the 3D dynamic response of MicroElectroMechanical Systems (MEMS). The data produced by Koala Acquisition & Analysis can be directly analyzed by this software to perform analysis of MEMS
MEMS geometries and movements are often complex to analyze with the presence of holes, or multiple structures. Displacements can be very small laterally and vertically, or very large compared to the structure size.
For each of these problems, MEMS Analysis Tool has a solution by providing:

 

33D Dynamical Topography Decomposition Into
  • In-plane vibrations with nanometer scale resolution given by the algorithm for sub-pixel detection
  • Out-of-plane vibrations with picometer scale vertical resolution
  • Deformation and tilt of structures along the period of excitation

Frequency response

  • Resonant frequency values
  • Phase and amplitude Bode diagrams
  • Fourier spectrum
  • Harmonics amplitudes

Electrical response

  • Comparative analysis of MEMS electrical response and 3D dynamical topography, as they are recorded synchronously by the stroboscopic module

Data management

  • Customization of graphics to display important features of your MEMS
  • Export graphics as bitmap or text files for preparing your reports and presentations
  • Easy data exportation for additional post-analysis

 

Non contact 3D holography system : Lynceetec is the only manufacturer who provides 3D images in sub nm resolution in few us. Suitable for image, step height, roughness, dynamic changes, lateral resolution 300 – 400nm (lens dependant), vibration insensitive. Commercial profilometers takes 5-6 seconds to construct interferogram/ images, other competing techniques for dynamic applications takes measurements in few selected points , full 3D images not possible.

 

Digital Holographic Microscope for Surface Analysis

Digital Holographic Microscope for Surface Analysis

DHM Measurement principle

The DHM™ instrument family generates, in real-time, high resolution 3D digital images of a sample surface using the principle of digital holography. Holograms are generated by illuminating the sample with a coherent laser beam, combining a reference wave with the wave received from a specimen

Figure 1: Reflective mode DHM Single wavelength configuration

Holograms are recorded by a CCD camera and transmitted to a computer for real-time numerical reconstruction. DHM™ Koala software procedures allow computation, from a single hologram acquired in just a few microseconds, of the complete wavefront emanating from an object, providing:-

Intensity image: shows the same contrast as with classical optical microscopy.

Phase image: provides quantitative data, used for accurate and stable measurements. the phase image reveals directly the surface topography with a sub-nanometre vertical resolution.

Holograms are acquired in single acquisition, so the instrument is insensitive to vibrations.
                                                       
Dual Wavelength DHM
The standard DHM setup use a single laser wavelength to generate images. By using a second laser wavelength it is possible to generate a synthetic a much longer wavelength which extends the ability of the microscope to measure step heights from around 340nm to up to 15 micron.
The unique mapping software allows fast imaging of step heights while maintaining the sub-nanometre resolution achieved with the single wavelength mode.

All DHM configurations provide real-time measurements of topography with sub-nanometer resolution within 200um vertical range.

Reflection DHM is available in three configurations

1.single laser source
2.dual laser sources: short synthetic wavelength
3.three laser sources: short and large synthetic wavelenght

DHM configured with a single wavelength is the ideal tool for measuring smooth surfaces with small local slopes, topography of samples with steps or discontinuities with height smaller than 300 nm within the 200µm live vertical range.

Measuring simultaneously at two wavelengths generates a synthetic wavelength which extends the ability of the microscope to measure step heights up to 2.4um and up to within the 200 μm vertical range.

Working in dual wavelength mode is identical as in single wavelength. It keeps the same ease-of-use and facilities

Benefits of this ultimate optical profiler

Measure dynamic 3D topography of deformable and samples

We are the only one offering such configuration enabling

  • Extension of the real time dynamic vertical  range for steps from 0.34 um  to 15 um
  • Provide  real time 3D measurement over the full field of view
  • Vertical measurement range up to 200um without any scanning

Real-time imaging   : Video rate acquisition and fast digital reconstruction allow real-time imaging. Dynamic event viewing and active interaction with the observed phenomena are therefore possible.

Robust & stable :  High acquisition rate (from 30 fps up to 1000fps) the short acquisition time (a few microseconds) makes the method insensitive to external vibrations and avoids the need for a vibration isolation table. Its stability permits prolonged examination sequences.

Contactless :  The technique uses low-power light to illuminate the sample and form the image.
It is a full field acqusition method without X/Y scanning within the field of view


 Factory Calibration :  The vertical  Z axis  is intrinsic to phase measurements: it is given by the wavelength of the laser used. The laser sources  used in conjunction with a interferential filter ensures perfect stability, specified to a precision better than 0.01 deg. A calibration with reference calibrated targets, as made for example for AFM, white light interferometers, and for scanning systems is therefore not necessary.


Instrumentation:

Digital Holographic Microscopy (DHM®) is a patented technology exploiting the strength of holography. The system combines DHM with hardware, dedicated software, and specific options to respond to the needs from innovative R&D to industrial applications.

The product range includes microscopes to look through samples (Transmission DHM) and microscopes to measure the reflected wavefront from the sample (Reflection DHM). The DHM technology and products have been developed by Lyncée Tec who also has the competence and flexibility to offer customization and OEM systems.

Roughness Surface roughness is calculated in less than a second
Ra = 37.7 nm Rt = 309.2 nm Rq = 51.8 nm

Ra = 29.1 nm Rt = 207.2 nm Rq = 42.3 nm

Step Height

Surface cracks

Surface cracks reduces the efficiency of solar cells quite a bit since transport of electrons are disturbed.

MEMS/Nanotechnology Application

MEMS/Nanotechnology Application HF Mirro

(Intensity)                                                              (Phase)

  • Driving frequency:40 kHz
  • Pulse length:       125 ns
  • Recovery cycle:    0.5%
  • Driving frequency:40 kHz
  • Pulse length:       1 µs
  • Recovery cycle:    4%


Membrane Hysteresis

Goals of the measurement

  • Measurements of hysteresis induced by the dipole alignment as a function of the applied voltage for increasing voltage amplitude
  • Determination of breaking voltage.
  • DHM R1000
  • Objectif:10x
  • Operating mode: stroboscopic
  • Driving signal: triangular
  • Frequency 10Hz
  • Voltage amplitude: 20,30,40V

Gyroscope

In – plane & out- of – plane motion
    

In – plane movement                           Out- of- plane movement


  1. Analysis:   In/out-of-plane dynamical displacement Resonant frequencies characterization
    Mechanical limitations of the movement

  2. Particularity : sample in vacuum  observation through transparent window

  3. Excitation : 4-6 kHz

  4. FOV: 250x250 µm2


Micro-optics


Fresnel lens array


Fresnel lens array


Corner cubes
High aspect ration measurements on corner cubes using immersion liquids


Micro-lens array (Mag. 10x)


Micro-lens array (Mag. 50x)


Si micro-lens array
Form & roughness measurements


Grating
Period and height measurements on a grating


Micro-lens hexagonal array


Micro-lens square array



Micro-technology


1 mm diameter metallic micro-ball
Radius measurements of micro-balls


Digitally flattened 1 mm diameter metallic micro-ball Roughness measurements on micro-balls


SiO2 Lines
Quality inspection


Irregular nanometric stairs
SiO2 layer thickness measurements on Si wafer

 

 

Nano-technology


Vertical calibration target


Lateral calibration target
Lateral calibration target


SiO2 spots on wafer
Control and characterisation of nanometric spots

Mems-Moems


High frequency mirror


Cantilever


Membrane


Variable capacitor


Micro-mirror


Vertical displacement mirror
Quality control of flatness, displacement and scratches

 

 

 

 

 

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