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3D Optical Profilometer

Profilometer > 3D Optical Profilometer

 

3D OPTICAL PROFILER

LOW COST - HIGH ACCURACY

Filmetrics has made optical profilometry affordable.

The Profilm3D uses state-of-the-art vertical scanning interferometry (VSI) combined with optional high accuracy phase shifting interferometry (PSI) to provide access to surface topography on the sub-nanometer scale at an unheard of price.

 

LARGEST FIELD-OF-VIEW

The Profilm3D’s exceptionally wide field-of- view - 2 mm with 10x objective lens - and its digital zoom helps mitigate the need for multiple objective lenses for different applications, thus further reducing the overall cost of ownership. For those applications where the flexibility of multiple objective lenses is still required, manual and automatic turrets are available.


Performance Specifications

Optional Accessories

  • PSI measurement capability, with tip-tilt stage
  • Automatic 100 mm x 100 mm XY stage
  • Manual 4-position turret with position sensing
  • Automatic 4-position turret with position sensing

  • Objectives 3 (Nikon CF IC Epi Plan)


  • Optional
  • 8 µm step
  • Sold separately
  • Pixel size on sample

  • for more information www.filmetrics.com
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