Holographic Optical Profilometer

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Profilometer > Holographic Optical Profilometer



The Holographic MEMS Analyzer measures 3D vibrations over the full field of view without XYZ scanning. Millions of data points are acquired simultaneously for measurement of 3D vibrations with similar resolution as a laser vibrometer.


Key Features
Live Dynamical 3D Topography
  • Frequency range from Static to 25MHz
  • Measure vertical velocities up to 10 m/s

    3D Vibration Analysis
  • Full field of view measurement without XYZ scanning
  • in-plane vibrations resolution :  1 nm
  • out-of-plane vibrations resolution : 5 pm

    Flexible Instrument
  • Turret with up to 6 objectives
  • Measurement in environmental chamber

    MEMS Analysis Tool Software

    It is a post processing software that provides a solution for performing detailed and precise analysis of the 3D dynamic response of MicroElectroMechanical Systems (MEMS). The data produced by Koala Acquisition & Analysis can be directly analyzed by this software to perform analysis of MEMS
    MEMS geometries and movements are often complex to analyze with the presence of holes, or multiple structures. Displacements can be very small laterally and vertically, or very large compared to the structure size.
    For each of these problems, MEMS Analysis Tool has a solution by providing:


    33D Dynamical Topography Decomposition Into
  • In-plane vibrations with nanometer scale resolution given by the algorithm for sub-pixel detection
  • Out-of-plane vibrations with picometer scale vertical resolution
  • Deformation and tilt of structures along the period of excitation

    Frequency response
  • Resonant frequency values
  • Phase and amplitude Bode diagrams
  • Fourier spectrum
  • Harmonics amplitudes

    Electrical response
  • Comparative analysis of MEMS electrical response and 3D dynamical topography, as they are recorded synchronously by the stroboscopic module

    Data management
  • Customization of graphics to display important features of your MEMS
  • Export graphics as bitmap or text files for preparing your reports and presentations
  • Easy data exportation for additional post-analysis

    Non contact 3D holography system : Lynceetec is the only manufacturer who provides 3D images in sub nm resolution in few us. Suitable for image, step height, roughness, dynamic changes, lateral resolution 300 – 400nm (lens dependant), vibration insensitive. Commercial profilometers takes 5-6 seconds to construct interferogram/ images, other competing techniques for dynamic applications takes measurements in few selected points , full 3D images not possible.


    Digital Holographic Microscope for Surface Analysis

    Digital Holographic Microscope for Surface Analysis

    DHM Measurement principle

    The DHM™ instrument family generates, in real-time, high resolution 3D digital images of a sample surface using the principle of digital holography. Holograms are generated by illuminating the sample with a coherent laser beam, combining a reference wave with the wave received from a specimen

    Figure 1: Reflective mode DHM Single wavelength configuration

    Holograms are recorded by a CCD camera and transmitted to a computer for real-time numerical reconstruction. DHM™ Koala software procedures allow computation, from a single hologram acquired in just a few microseconds, of the complete wavefront emanating from an object, providing:-

    Intensity image: shows the same contrast as with classical optical microscopy.

    Phase image: provides quantitative data, used for accurate and stable measurements. the phase image reveals directly the surface topography with a sub-nanometre vertical resolution.

    Holograms are acquired in single acquisition, so the instrument is insensitive to vibrations.
    Dual Wavelength DHM
    The standard DHM setup use a single laser wavelength to generate images. By using a second laser wavelength it is possible to generate a synthetic a much longer wavelength which extends the ability of the microscope to measure step heights from around 340nm to up to 15 micron.
    The unique mapping software allows fast imaging of step heights while maintaining the sub-nanometre resolution achieved with the single wavelength mode.

    All DHM configurations provide real-time measurements of topography with sub-nanometer resolution within 200um vertical range.

    Reflection DHM is available in three configurations

    1.single laser source
    2.dual laser sources: short synthetic wavelength
    3.three laser sources: short and large synthetic wavelenght

    DHM configured with a single wavelength is the ideal tool for measuring smooth surfaces with small local slopes, topography of samples with steps or discontinuities with height smaller than 300 nm within the 200µm live vertical range.

    Measuring simultaneously at two wavelengths generates a synthetic wavelength which extends the ability of the microscope to measure step heights up to 2.4um and up to within the 200 μm vertical range.

    Working in dual wavelength mode is identical as in single wavelength. It keeps the same ease-of-use and facilities

    Benefits of this ultimate optical profiler

    Measure dynamic 3D topography of deformable and samples

    We are the only one offering such configuration enabling

  • Extension of the real time dynamic vertical  range for steps from 0.34 um  to 15 um
  • Provide  real time 3D measurement over the full field of view
  • Vertical measurement range up to 200um without any scanning
  • Real-time imaging   : Video rate acquisition and fast digital reconstruction allow real-time imaging. Dynamic event viewing and active interaction with the observed phenomena are therefore possible.

    Robust & stable :  High acquisition rate (from 30 fps up to 1000fps) the short acquisition time (a few microseconds) makes the method insensitive to external vibrations and avoids the need for a vibration isolation table. Its stability permits prolonged examination sequences.

    Contactless :  The technique uses low-power light to illuminate the sample and form the image.
    It is a full field acqusition method without X/Y scanning within the field of view

     Factory Calibration :  The vertical  Z axis  is intrinsic to phase measurements: it is given by the wavelength of the laser used. The laser sources  used in conjunction with a interferential filter ensures perfect stability, specified to a precision better than 0.01 deg. A calibration with reference calibrated targets, as made for example for AFM, white light interferometers, and for scanning systems is therefore not necessary.


    Digital Holographic Microscopy (DHM®) is a patented technology exploiting the strength of holography. The system combines DHM with hardware, dedicated software, and specific options to respond to the needs from innovative R&D to industrial applications.

    The product range includes microscopes to look through samples (Transmission DHM) and microscopes to measure the reflected wavefront from the sample (Reflection DHM). The DHM technology and products have been developed by Lyncée Tec who also has the competence and flexibility to offer customization and OEM systems.

    Roughness Surface roughness is calculated in less than a second
    Ra = 37.7 nm Rt = 309.2 nm Rq = 51.8 nm

    Ra = 29.1 nm Rt = 207.2 nm Rq = 42.3 nm

    Step Height

    Surface cracks

    Surface cracks reduces the efficiency of solar cells quite a bit since transport of electrons are disturbed.

    Fig 1: Control well

    Fig 2: HeLa cells treated with Doxorubicin

    Biologic Imaging

    DHM technology enables to see the livecell  movements online at the same time height related information is obtained due   to DHM interferometry.


    There is no need of using any contrasting agent,fluorescent tag etc which usually creates some interference in what you want to observe.You will find data acquisition to be very fast & technique is very insensitive to vibrations. It is easy to use.


    It is very useful for  your various biological applicatons.You can keep your cells in various medium, see its response & behaviour in various medium.You can also see effect of toxicity on cells,along with information on cell topography &  height measurements of cells. You can also view effect of drug on cells. You can go through the following link to watch some.

    Real time video 16 images/sec in AVI format possible,300fps with post contruction mode also possible.

    Z resolution 1nm(microscope objective dependent)

    Live quantification of cytotoxicity with DHM. HeLa cells treated with doxorubicin imaged continuously for 24 hours.

    Live cell imaging, quantification can be performed without labeling the cells.   https://www.lynceetec.com/biological-imaging-introduction-phase-signal-interpretation/ 

    Application page with videos

     1) This application is an assessment of the High Content Screening solution applied to cytotoxicity assays using living cells. https://www.lynceetec.com/cell-based-assays/#tab-1     2) 4D cell imaging allows to study dry mass production rate and the dry mass surface density in wild-type and mutant fission yeast cells. It demonstrates the applicability of DHM® as a tool for label-free quantitative analysis of the cell cycle. https://www.lynceetec.com/4d-cell-imaging/  

    MEMS/Nanotechnology Application

    MEMS/Nanotechnology Application HF Mirro

    (Intensity)                                                              (Phase)

    • Driving frequency:40 kHz
    • Pulse length:       125 ns
    • Recovery cycle:    0.5%
    • Driving frequency:40 kHz
    • Pulse length:       1 µs
    • Recovery cycle:    4%

    Membrane Hysteresis

    Goals of the measurement

  • Measurements of hysteresis induced by the dipole alignment as a function of the applied voltage for increasing voltage amplitude
  • Determination of breaking voltage.
  • DHM R1000
  • Objectif:10x
  • Operating mode: stroboscopic
  • Driving signal: triangular
  • Frequency 10Hz
  • Voltage amplitude: 20,30,40V
  • Gyroscope

    In – plane & out- of – plane motion

    In – plane movement                           Out- of- plane movement

  • Analysis:   In/out-of-plane dynamical displacement Resonant frequencies characterization
    Mechanical limitations of the movement

  • Particularity : sample in vacuum  observation through transparent window

  • Excitation : 4-6 kHz

  • FOV: 250x250 µm2

  • Micro-optics

    Fresnel lens array

    Fresnel lens array

    Corner cubes
    High aspect ration measurements on corner cubes using immersion liquids

    Micro-lens array (Mag. 10x)

    Micro-lens array (Mag. 50x)

    Si micro-lens array
    Form & roughness measurements

    Period and height measurements on a grating

    Micro-lens hexagonal array

    Micro-lens square array


    1 mm diameter metallic micro-ball
    Radius measurements of micro-balls

    Digitally flattened 1 mm diameter metallic micro-ball Roughness measurements on micro-balls

    SiO2 Lines
    Quality inspection

    Irregular nanometric stairs
    SiO2 layer thickness measurements on Si wafer




    Vertical calibration target

    Lateral calibration target
    Lateral calibration target

    SiO2 spots on wafer
    Control and characterisation of nanometric spots


    High frequency mirror



    Variable capacitor


    Vertical displacement mirror
    Quality control of flatness, displacement and scratches



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