Filmetrics Inc, USA -by KLA Corporation 3D Profilometer
Optical 3D profilometer
Automated XY 100x100mm
Four-position turret 10X, 20X, 50X & 100X
PSI & WLI
The Profilm3D® optical profiler uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001µm. The newest generation of the Profilm3D optical profilometer offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.
The Profilm3D / Profilm3D-200 are affordable, state of the art optical profilers. The Profilm3D family of profilers use industry-standard white-light-interferometry (WLI) and optional Phase-shifting-interferometry (PSI) to produce high quality surface profiles and infinite depth of field True color images.
XY Stage Range
100mm x 100mm
200mm x 200mm
*Automated XY stage with 100x100mm travel (Profilm3D), 200x200mm travel (Profilm3D-200)
*Automated Focus with 100mm travel
**Tip-Tilt stage with +/-5 deg travel
*Industry leading 500um piezo travel
*Industry leading 2mm wide field of view with 10x objective
For more information visit: https://www.filmetrics.com/profilometers/profilm3d