Lynceetec, Switzerland
Reflection DHM
Unrivalled acquisition speed
In-situ process characterization
Sub-nanometric vertical resolution at any magnification
Transmission DHM
Reflection DHM measures the reflected wavefront from the sample, i. e. the surface topography in the
case of a purely reflecting sample.
Software
The proprietary software Koala Acquisition & Analysis is the master software of the DHM instrument by
Lyncée Tec.
