The M-2000® line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general-purpose thin film characterization. No other ellipsometer technology acquires a full spectrum faster.
The M-2000® is a versatile spectroscopic ellipsometer, suited to many different sample types. Coatings can be dielectrics, organics, semiconductors, and even thin metals.
Wavelength RangeÂ
370-1000nm (390 detectors), 245-1000nm (470 detectors), 210-1000nm (485 detectors), 193-1000nm (500 detectors), 370-100nm (580 detectors), 245-1700nm, (660 detectors), Auto Angle 45-90o, Auto Z
M2000 Accessories
Focusing spot 120 -300 μm
Transmission 180% / variable motorised angle
XY Auto: 100 x100, 200 x200, 300 x300, 450 x 450mm
Auto tip tilt
Temperature RT -3000C, -70 to 6nil
RT – 10000C, 4.2 -5000C,4.2 to 8000C
Liquide /Electrochemical /QCM Cell
Camera
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