R50/R54-Series
Sheet Resistance Mapping
The 4PP contact four-point probe configuration is recommended for thin metal and ion implant layers, and the non-contact Eddy Current (EC) probe is recommended for thicker metal layers and soft or flexible conductive surfaces
Measurement Range 1mΩ/sq –
200MΩ/sq/ 1mΩ/sq – 50Ω/sq
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