The VASE® is our most established and versatile ellipsometer. Useful for research on all types of materials, including semiconductors, dielectrics, polymers, metals, multi-layers, and more. Variable wavelength and angle of incidence enable flexible measurement capabilities. The VASE combines high accuracy and precision with the widest spectral range in the industry, 193 to 4000 nm. Available Ranges 240-2500nm, 240-3200nm, 240-4000nm in steps of 0.1nm, Auto angle 15-90o, Auto Z
Maximum Data Accuracy
The VASE features a rotating analyzer ellipsometer (RAE) combined with our patented AutoRetarder® for unparalleled data accuracy.
High Precision Wavelength Selection
Our custom-built scanning monochromator is designed specifically for spectroscopic ellipsometry, optimizing speed, wavelength accuracy, and light throughput, while automatically controlling wavelength selection and spectral resolution.
Flexible Measurements
The VASE features a vertical sample mount and vacuum stage to accommodate a large variety of measurement geometries including reflection, transmission, and scattering.
Extended Wavelength Range
The VASE offers multiple combinations of detectors, including our latest 4IR extension which allows for measurements up to 4000 nm.
AutoRetarder® Technology
The VASE is able to collect the most accurate data of any ellipsometer through its use of our patented AutoRetarder. The AutoRetarder adjusts the polarization state of the incident measurement beam to provide optimal sensitivity for all types of materials. This provides an optimum measurement for any sample, under any conditions.
AutoRetarder accurately measures:
+Ψ and Δ over the full range
+Generalized (anisotropic) Ellipsometry
+Depolarization data
+Mueller-matrix data
Custom Monochromator
Our custom-built, double-chamber monochromator provides superior stray-light rejection. Up to four gratings are used to provide the most efficient reflectivity across the measured spectral range. The monochromator is located before the sample, which restricts the intensity of light incident on the sample to just a narrow bandwidth around the wavelength being measured. This avoids photo-bleaching of light-sensitive samples, as can happen for other ellipsometers where the monochromator is placed after the sample.
Extended NIR Detection
The VASE has always offered the widest wavelength range of our UV-VIS-NIR ellipsometers. We recently added a new liquid-nitrogen-cooled InSb detector for measurements up to 4 μm in the infrared. The detector is enclosed inside a liquid nitrogen dewar; when filled before data acquisition, it provides up to eight hours of data collection. Combined with our standard UV-VIS detector, the continuous spectral range from 193 to 4000 nm can be measured.
VASE Accessories
Wavelength Extension 2.5 to 3.2 μm,2.5 to 4 μm
Focusing …..
Auto XY 50 x50nm
Temperature RT -3000C, – 700C to 6000C
RT – 100000C,4.2 to 5000C, 4.2 to 8000C,
Liquide /Electrochemical /Prism Cell
Camera
For more Information, please visit https://www.jawoollam.com/
Reviews
Clear filtersThere are no reviews yet.