Transmission DHM

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Reflection DHM measures the reflected wavefront from the sample, i. e. the surface topography in the
case of a purely reflecting sample.
DHM® is more than a standard optical profilometer as it enables dynamic measurement within vertical
ranges from nanometers to hundreds of microns with sub-nanometric vertical resolution.

Applications:
Surface topography
Surface finish

Defect inspection
Structured thin film
MEMS measurement